Magnetic semiconducting thin films with remanence at room temperature are of primary importance for spintronic applications. We plan to realize one of such films by MBE, doping with copper TiO2 anatase films grown in epitaxy on LaAlO3(001). We will use in situ non-resonant and resonant x-ray diffraction (RXRD) at the Cu K edge to study the films structure.With RXRD we want to determine if Cu is in substitutional sites and on which ones.