The objective of our project is to use the highly defined vacuum deposition process with a new patented deposition tool to deposit novel perovskite layer and device structures, and to perform a comprehensive characterization using high-resolution surface scattering (GIWAXS). In particular, we wish to study two kinds of 2D perovskite thin film structures grown by vacuum evaporation: The self-assembled 2D structures already demonstrated by liquid processing, which, similar to well-known semiconductor materials, can form thin films via co-evaporation of different precursor materials, resulting in 2D layers with different electronic gaps, which allows to observe quantum confinement in perovskites for the first time. As another completely new approach, we will use a vacuum-deposition process with subsequent deposition of materials with different electronic gaps to realize novel types of quantum wells and superlattice structures, which are difficult to prepare by liquid processing.