Co-based Heusler alloys are predicted to be an ideal material for spintronics due to their high Curie temperature and potential in magnetic heterostructrue devices. We have recently completed a PNR study of Co2FeAl0.5Si0.5 grown on Si(111), and found there to be reduced magnetic moment in the film (5.7uB) and a magnetic dead layer at the interface due to silicon diffusion from the substrate. We have now grown CoFeAl0.5Si0.5 on Ge(111) and intend to perform PNR to analyse the magnetic and structural profile of the samples. We expect to see enhanced magnetism in the film (6uB), and for the magnetic and structural profiles to be correlated due to the lack of silicon diffusion.